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Foundry Service

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  • 7
    • Foundry - Etc 인기글
    • 7 SEMITECH | 09-03 | View 4038
    • ●Wet Station ■ Wet Bath & Spin Dryer ■ Dry Oven • Range Amb . +10 to 250 ℃ • Heating Time to 100 ℃ -> 9min • Recovery time at 100 ℃ -> 2min ​ ​ ● Inspection & Measurement ■ RS Measurement ■ Sheet Resistance ● …
  • 6
    • Foundry - Deposition 인기글
    • 6 SEMITECH | 09-03 | View 3875
    • ● 협력사 보유 • LP-CVD / PE-CVD : A-Silicon / Silicon Nitride Film • Plasma Deposition : Dielectric Film (SiO2, Si3N4…) • Evaporator • Metallization System : Al, Au, Ti, Cr, Pt, Ni, CrN , TiO2 ​ ​
  • 5
    • Foundry - Etch 인기글
    • 5 SEMITECH | 09-03 | View 3574
    • ● Dry Etch ■ICP-Etch • Full Automation • 7 Slot Cassette • Wafer Size 2”~12” • High Capacity for GaN & Sapphire Etching ● 협력사 보유 • Dry Etcher : Nitride, Oxide, Poly-Si, Metal Etching • Deep Reactive Dry Etcher : Vertical Silicon …
  • 4
    • Foundry - Photolithography(150mm/6") 인기글
    • 4 SEMITECH | 09-03 | View 3770
    • ​ ● Photolithography(150mm/6”) ■ Photo Stepper-1 • Single Side Alignment • Full Automation • G-Line / I-Line • Resolution (0.5 ㎛ ) ■ PR Track • HMDS Coating • PR Coating & Develop • Soft &…
  • 3
    • Foundry - Diffusion 인기글
    • 3 SEMITECH | 08-28 | View 3741
    • ■ Anneal(150MM/6") ​ ◆ RTA(AST-2800) - Process Temp Range 400 ~ 1,200 ℃ - Annealing & Thermal Oxidation - Cassette TYPE ◆ Furnaces : Thermal Oxidation/Impurity Diffusion/Annealing/Metal Alloying
  • 2
    • Foundry - IMPLANT(150mm/6") 인기글
    • 2 SEMITECH | 08-28 | View 3587
    • ■ IMPLANT(150mm/6") MC IMP, E220HP MC IMP, E220HP ​ ​ Parameter E220HP E-1000 Species B, BF 2, P, (As), Ar , N B, BF 2 , P, (As), Ar , N Energy 10~200KeV Decel / Drift Double Charged Ions 10~200keV Decel / Drift Dos…
  • 1
    • Foundry Service 인기글
    • 1 SEMITECH | 08-28 | View 4006
    • 1) 생산설비 · Implant : High Current(E-1000) / Medium Current(E220HP) ​ · Photolithograph : Stepper(G-Line, I-Line) / PR Track · Etch : Dry Etch / Wet Etch · Deposition : RTA 2) 생산시설 · Clean Room : Class 1,000 / 420 ㎡ · Utility : PN2, GN2, CDA, PCW, P…
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