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Foundry - Photolithography(150mm/6")

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Writer SEMITECH 작성일15-09-03 16:46 View 4,403

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● Photolithography(150mm/6”)

 

■ Photo Stepper-1

 

Single Side Alignment

 

Full Automation

 

G-Line / I-Line

 

Resolution (0.5)

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           ■ PR Track

 

          • HMDS Coating

 

          • PR Coating & Develop

 

          • Soft & Hard Bake

 

          • Positive & Negative Type
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