1. Description: DPS Poly Chamber

2. DTCU Type: R1 DTCU

3. Wafer Type: SNNF

4. ESC Type: Polymide

5. Trottle valve: STD

6. Gate valve: STD

7. Cathode: Single Type

8. Turbo pump: Leybold Mag 2000

9. Missing: Match Box, H/V Module, Turbo Controller