Foundry - IMPLANT(150mm/6")

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Writer SEMITECH 작성일15-08-28 14:58 View 12,334

■ IMPLANT(150mm/6")

MC IMP, E220HP

Parameter	E220HP	E-1000
Species	B, BF2, P, (As), Ar, N	B, BF2, P, (As), Ar, N
Energy	10~200KeV Decel / Drift Double Charged Ions	10~200keV Decel / Drift
Dose	1E12~5E14 ions/㎠ Uniformity(1σ): ≤1.5% Reproducibility(1σ): ≤1.5%	5E13~5E16 ions/cm2 Uniformity(1σ): ≤1.5% Reproducibility(1σ): ≤1.5%
Tile	0° to 60°	-7° to +7°
Dimensions	150mm/6” to (200mm/8”)	150mm/6” to (200mm/8”)
Rotation	Available	-----
Cooling	100℃↓ @200W	100℃↓ @2,800W