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Foundry - Deposition

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Writer SEMITECH 작성일15-09-03 16:53 View 6,583

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● 협력사 보유

 

LP-CVD / PE-CVD : A-Silicon / Silicon Nitride Film

 

Plasma Deposition : Dielectric Film (SiO2, Si3N4…)

 

Evaporator

 

Metallization System : Al, Au, Ti, Cr, Pt, Ni, CrN, TiO2
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