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Writer SEMITECH 작성일15-09-03 17:03 View 6,829

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●Wet Station

 

■ Wet Bath & Spin Dryer


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■ Dry Oven

 

Range Amb. +10 to 250

 

Heating Time to 100-> 9min

 

Recovery time at 100-> 2min
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● Inspection & Measurement

 

 

■ RS Measurement

 

■ Sheet Resistance

 

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● Microscope

 

    ■ Particle Check & Inspection

 

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■ CD Measurement

 

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■ SEM
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●Inspection & Measurement

         ■ 3D Profiler

 

    ■ Defect & Depth Profile

 

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● 협력사 보유

 

Dicing SAW : Si / Glass

 

Inspection System : OVP Tester / Final Inspection System

 

 


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