DPS R1 Poly Chamber Assy(As-is) > Equipments

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DPS R1 Poly Chamber Assy(As-is)

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Writer SEMITECH Date17-04-05 09:50 View3,246
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1. Description: DPS Poly Chamber

2. DTCU Type: R1 DTCU

3. Wafer Type: SNNF

4. ESC Type: Polymide

5. Trottle valve: STD

6. Gate valve: STD

7. Cathode: Single Type

8. Turbo pump: Leybold Mag 2000

 

9. Missing: Match Box, H/V Module, Turbo Controller

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