Parameter

E220HP

E-1000 

Species

  B, BF2, P, (As), Ar, N

  B, BF2, P, (As), Ar, N

Energy

  10~200KeV

  Decel / Drift

  Double Charged Ions

  10~200keV

  Decel / Drift

Dose 

  1E12~5E14 ions/㎠

  Uniformity(1σ): ≤1.5%  Reproducibility(1σ):  ≤1.5%

  5E13~5E16 ions/cm2

  Uniformity(1σ): ≤1.5% 

  Reproducibility(1σ):  ≤1.5%

Tile

  0° to 60°

  -7° to +7°

Dimensions

  150mm/6” to (200mm/8”)

  150mm/6” to (200mm/8”)

Rotation

   Available

  -----

Cooling

  100℃↓ @200W

  100℃↓ @2,800W