■ Anneal(150MM/6")

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  ◆ RTA(AST-2800)

    - Process Temp Range 400 ~ 1,200 ℃

    - Annealing & Thermal Oxidation

    - Cassette TYPE

 ◆ Furnaces : Thermal Oxidation/Impurity Diffusion/Annealing/Metal Alloying