Foundry - Photolithography(150mm/6")
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Writer SEMITECH 작성일15-09-03 16:46 View 13,334본문
● Photolithography(150mm/6”)
■ Photo
Stepper-1
• Single
Side Alignment
•
Full Automation
•
G-Line / I-Line
•
Resolution (0.5㎛)
■ PR
Track
• HMDS
Coating
•
PR Coating & Develop
•
Soft & Hard Bake
•
Positive & Negative Type
