Foundry - Photolithography(150mm/6")
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Writer SEMITECH 작성일15-09-03 16:46 View 12,953본문
● Photolithography(150mm/6”)
■ Photo
Stepper-1
• Single
Side Alignment
•
Full Automation
•
G-Line / I-Line
•
Resolution (0.5㎛)
■ PR
Track
• HMDS
Coating
•
PR Coating & Develop
•
Soft & Hard Bake
•
Positive & Negative Type
![f551ffec672ed908e623df1175ada571_1441266353_4699.png f551ffec672ed908e623df1175ada571_1441266](http://semi.whoiserp.com/data/editor/1509/f551ffec672ed908e623df1175ada571_1441266353_4699.png)