Foundry - Deposition
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Writer SEMITECH 작성일15-09-03 16:53 View 12,263본문
● 협력사 보유
• LP-CVD / PE-CVD : A-Silicon
/ Silicon Nitride Film
• Plasma Deposition : Dielectric
Film (SiO2, Si3N4…)
• Evaporator
•
Metallization System : Al,
Au, Ti, Cr, Pt, Ni, CrN,
TiO2
