​

PSS-MGT SERIES (Multi Type)

PS22-MGT SERIES (Single Type)

■ Gases purified : Clean Dry Air (CDA)

■ Impurities removed :

  H20, CO2 < 100 ppt

  TOCs (Total Organic Compounds), Acids, Refractory Compounds < 1 ppt

  Bases < 5 ppt

■ Fully automatically regenerable.

■ HMI touch screen display.

■ Fully automated microprocessor.

■ Continuous control and diagnostics managed by PLC.

■ Integrated 0.003μm particle filter.

■ Flow rates up to 10,000 Nm3/hr.

■ The purifier is widely accepted by lithography systems in the semiconductor field.