PS22-MGT SERIES (Single Type)
■ Gases purified : Clean Dry Air (CDA)
■ Impurities removed :
H20, CO2 < 100 ppt
TOCs (Total Organic Compounds), Acids, Refractory Compounds < 1 ppt
Bases < 5 ppt
■ Fully automatically regenerable.
■ HMI touch screen display.
■ Fully automated microprocessor.
■ Continuous control and diagnostics managed by PLC.
■ Integrated 0.003μm particle filter.
■ Flow rates up to 10,000 Nm3/hr.
■ The purifier is widely accepted by lithography systems in the semiconductor field.