RTP_Mattson_AST-2800
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Writer SEMITECH Date15-11-05 15:40 View10,951
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Specification : 5"~8"/200wafers / Automatic(PC) Control
10 Zone Control / (Option) Pyrometer
Temp. Rage : 400~1200℃ / Repeatability : ±3.5℃
Temp. Uniformity : ±5℃, 8" wafer at 1,150℃
Condition: As-is Working
