DPS R1 Poly Chamber Assy(As-is)
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Writer SEMITECH Date17-04-05 09:50 View10,283
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1. Description: DPS Poly Chamber
2. DTCU Type: R1 DTCU
3. Wafer Type: SNNF
4. ESC Type: Polymide
5. Trottle valve: STD
6. Gate valve: STD
7. Cathode: Single Type
8. Turbo pump: Leybold Mag 2000
9. Missing: Match Box, H/V Module, Turbo Controller
