RTP_Mattson_AST-2800
페이지 정보
Writer SEMITECH Date15-11-05 15:40 View10,246
본문
Specification : 5"~8"/200wafers / Automatic(PC) Control
10 Zone Control / (Option) Pyrometer
Temp. Rage : 400~1200℃ / Repeatability : ±3.5℃
Temp. Uniformity : ±5℃, 8" wafer at 1,150℃
Condition: As-is Working
