AMAT 200mm Centura-II EMAX 3CH System
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Writer SEMITECH Date23-07-21 09:46 View1,283
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AMAT Centura-II EMAX 3 CH System
POS A, B, C: EMAX Chamber (STP1603 Turbo Pump)
POS F: Orientor CH
WBLL, VHP Robot Assy, OEM28B-02, EPD Controller with HOT PACK
Exculde items: Process KIT, ESC, MFC
